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Laser Annealing Processes In Semiconductor Technology

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Laser Annealing Processes in Semiconductor Technology

Laser Annealing Processes in Semiconductor Technology Book
Author : Fuccio Cristiano,Antonino La Magna
Publisher : Woodhead Publishing
Release : 2021-04-21
ISBN : 0128202564
Language : En, Es, Fr & De

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Book Description :

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering. Introduces the fundamentals of laser materials and device fabrication methods, including laser-matter interactions and laser-related phenomena Addresses advances in physical modeling and in predictive simulations of laser annealing processes such as atomistic modeling and TCAD simulations Reviews current and emerging applications of laser annealing processes such as CMOS technology and group IV semiconductors

Laser Assisted Microtechnology

Laser Assisted Microtechnology Book
Author : Simeon M. Metev,Vadim P. Veiko
Publisher : Springer Science & Business Media
Release : 2013-03-09
ISBN : 3642872719
Language : En, Es, Fr & De

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Book Description :

Laser-Assisted Microtechnology introduces the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented in detail. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter concerning the laser-assisted wet chemical micro etching, has been added. This is a new method for direct 3D-micro structuring of solids, with a number of potential applications.

Laser Annealing of Semiconductors

Laser Annealing of Semiconductors Book
Author : J Poate
Publisher : Elsevier
Release : 2012-12-02
ISBN : 0323145426
Language : En, Es, Fr & De

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Book Description :

Laser Annealing of Semiconductors deals with the materials science of surfaces that have been subjected to ultrafast heating by intense laser or electron beams. This book is organized into 13 chapters that specifically tackle transient annealing of compound semiconductors. After briefly dealing with an overview of laser annealing, this book goes on discussing the concepts of solidification and crystallization pertinent to the field. These topics are followed by discussions on the main mechanisms of interaction of photon and electron beams with condensed matter; the calculation of thermophysical properties of crystalline materials; and high-speed crystal growth by laser annealing of ion-implanted silicon. The subsequent chapters describe the microstructural and topographical properties of annealed semiconductor layers and the epitaxy of ion-implanted silicon irradiated with a laser or electron beam single pulse. This text also explores the electronic and surface properties and the continuous-wave beam processing of semiconductors. The concluding chapters cover various reactions in metal-semiconductor systems, such as fast and laser-induced melting, solidification, mixing, and quenching. Laser-induced interactions in metal-semiconductor systems and the factors involved in control of the heat treatment process are also discussed in these chapters. Materials scientists and researchers and device engineers will find this book invaluable.

Silicon Compatible Emerging Materials Processes and Technologies for Advanced CMOS and Post CMOS Applications 9

Silicon Compatible Emerging Materials  Processes  and Technologies for Advanced CMOS and Post CMOS Applications 9 Book
Author : F. Roozeboom,P. J. Timans,K. Kakushima,E. Gusev,Z. Karim,D. Misra,Y. S. Obeng,S. De Gendt,H. Jagannathan
Publisher : The Electrochemical Society
Release : 2019-05-17
ISBN : 1607688689
Language : En, Es, Fr & De

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Book Description :

This issue of ECS Transactions includes papers based on presentations from the symposium "Silicon Compatible Emerging Materials, Processes, and Technologies for Advanced CMOS and Post-CMOS Applications 9," originally held at the 235th ECS Meeting in Dallas, Texas, May 26-30, 2019.

Scientific and Technical Aerospace Reports

Scientific and Technical Aerospace Reports Book
Author : Anonim
Publisher : Unknown
Release : 1985
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Scientific and Technical Aerospace Reports book written by , available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Silicon Compatible Materials Processes and Technologies for Advanced Integrated Circuits and Emerging Applications 8

Silicon Compatible Materials  Processes  and Technologies for Advanced Integrated Circuits and Emerging Applications 8 Book
Author : F. Roozeboom,P.J. Timans,K. Kakushima,H. Jagannathan,Z. Karim,E. P. Gusev,S. De Gendt
Publisher : The Electrochemical Society
Release : 2018-05-04
ISBN : 1607688344
Language : En, Es, Fr & De

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Book Description :

Download Silicon Compatible Materials Processes and Technologies for Advanced Integrated Circuits and Emerging Applications 8 book written by F. Roozeboom,P.J. Timans,K. Kakushima,H. Jagannathan,Z. Karim,E. P. Gusev,S. De Gendt, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Advances in Laser Materials Processing

Advances in Laser Materials Processing Book
Author : J. R. Lawrence
Publisher : Woodhead Publishing
Release : 2017-09-20
ISBN : 0081012535
Language : En, Es, Fr & De

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Book Description :

Advances in Laser Materials Processing: Technology, Research and Application, Second Edition, provides a revised, updated and expanded overview of the area, covering fundamental theory, technology and methods, traditional and emerging applications and potential future directions. The book begins with an overview of the technology and challenges to applying the technology in manufacturing. Parts Two thru Seven focus on essential techniques and process, including cutting, welding, annealing, hardening and peening, surface treatments, coating and materials deposition. The final part of the book considers the mathematical modeling and control of laser processes. Throughout, chapters review the scientific theory underpinning applications, offer full appraisals of the processes described and review potential future trends. A comprehensive practitioner guide and reference work explaining state-of-the-art laser processing technologies in manufacturing and other disciplines Explores challenges, potential, and future directions through the continuous development of new, application-specific lasers in materials processing Provides revised, expanded and updated coverage

Semiconductor Technology ISTC 2001

Semiconductor Technology  ISTC 2001  Book
Author : Ming Yang
Publisher : Unknown
Release : 2001
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Semiconductor Technology ISTC 2001 book written by Ming Yang, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Ion Implantation in Semiconductors 1976

Ion Implantation in Semiconductors 1976 Book
Author : Fred Chernow
Publisher : Springer Science & Business Media
Release : 2012-12-06
ISBN : 1461341965
Language : En, Es, Fr & De

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Book Description :

The Fifth International Conference on Ion Implantation took place in Boulder, Colorado between the 9th and 13th of August 1976. Papers were delivered by scientists and engineers from 15 countries, and the attendees represented 19 countries. As has become the custom at these conferences, the sessions were intense with the coffee breaks and evenings given to informal meetings among the participants. It was a time to renew old friendships, begin new ones, exchange ideas, personally question authors of papers that appeared in the literature since the last conference and find out what was generally happening in Ion Implantation. In recent years it has beome more difficult to get funding to travel to such meetings. To assist the participating authors financial aid was solicited from industry and the Office of Naval Research. We are most grateful for their positive response to our requests. The success of the conference was in part due to their generous contributions. The Program Committee had the unhappy task of the reviewing of more than 170 abstracts. The result of their labors was well worth their effort. Much thanks goes to them for molding the conference into an accurate representation of activities in the field. Behind the scenes in Boulder, local arrangements were handled ably by Graeme Eldridge. The difficulty of this task cannot be overemphasized. Our thanks to him for a job well done.

Laser Applications in Surface Science and Technology

Laser Applications in Surface Science and Technology Book
Author : Horst-Günter Rubahn
Publisher : John Wiley & Sons
Release : 1999-03-17
ISBN : 9780471984504
Language : En, Es, Fr & De

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Book Description :

Lasers are becoming increasingly important in surface science, both for the diagnostic evaluation and the processing of surfaces, for example, higher harmonic generation for diagnosis and the widespread use of laser surface microstructuring and annealing for processing. The physics behind such applications might be described in some cases by simple heating and melting processes, but can also include much more complex phenomena such as plasma generation or elementary collective surface excitations. Laser Applications in Surface Science and Technology provides an overview of the different techniques, discusses the principles behind them and gives a concise description of laser-induced and laser-detected processes on surfaces. Recent developments in the field such as nonlinear surface spectroscopies and the interactions of ultrashort pulses with materials, are also introduced. Invaluable reading for postgraduate students and research scientists across a wide range of disciplines including: physics, chemistry, electronic engineering and materials science.

Rapid Thermal and Other Short time Processing Technologies II

Rapid Thermal and Other Short time Processing Technologies II Book
Author : Dim-Lee Kwong,Electrochemical Society. Electronics Division,Electrochemical Society. High Temperature Materials Divisions
Publisher : The Electrochemical Society
Release : 2001
ISBN : 9781566773157
Language : En, Es, Fr & De

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Book Description :

"Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."

ULSI Process Integration 5

ULSI Process Integration 5 Book
Author : Cor L. Claeys
Publisher : The Electrochemical Society
Release : 2007-01-01
ISBN : 1566775728
Language : En, Es, Fr & De

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Book Description :

The symposium provided a forum for reviewing and discussing all aspects of process integration, with special focus on nanoscaled technologies, 65 nm and beyond on DRAM, SRAM, flash memory, high density logic-low power, RF, mixed analog-digital, process integration yield, CMP chemistries, low-k processes, gate stacks, metal gates, rapid thermal processing, silicides, copper interconnects, carbon nanotubes, novel materials, high mobility substrates (SOI, sSi, SiGe, GeOI), strain engineering, and hybrid integration.

White papers

White papers Book
Author : United States. Dept. of Energy Advisory Board. Task Force on Alternative Futures for the Department of Energy National Laboratories
Publisher : Unknown
Release : 1995
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download White papers book written by United States. Dept. of Energy Advisory Board. Task Force on Alternative Futures for the Department of Energy National Laboratories, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Energy and Water Development Appropriations for 1996 no subtitle

Energy and Water Development Appropriations for 1996  no subtitle Book
Author : United States. Congress. House. Committee on Appropriations. Subcommittee on Energy and Water Development
Publisher : Unknown
Release : 1995
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Energy and Water Development Appropriations for 1996 no subtitle book written by United States. Congress. House. Committee on Appropriations. Subcommittee on Energy and Water Development, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Alternative Futures for the Department of Energy National Laboratories the Galvin Report and National Laboratories Need Clearer Missions and Better Management a GAO Report to the Secretary of Energy

Alternative Futures for the Department of Energy National Laboratories  the Galvin Report  and National Laboratories Need Clearer Missions and Better Management  a GAO Report to the Secretary of Energy Book
Author : United States,United States. Congress. House. Committee on Science. Subcommittee on Basic Research
Publisher : Unknown
Release : 1995
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Alternative Futures for the Department of Energy National Laboratories the Galvin Report and National Laboratories Need Clearer Missions and Better Management a GAO Report to the Secretary of Energy book written by United States,United States. Congress. House. Committee on Science. Subcommittee on Basic Research, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Nanoelectronics

Nanoelectronics Book
Author : Robert Puers,Livio Baldi,Marcel Van de Voorde,Sebastiaan E. van Nooten
Publisher : John Wiley & Sons
Release : 2017-04-11
ISBN : 3527800719
Language : En, Es, Fr & De

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Book Description :

Offering first-hand insights by top scientists and industry experts at the forefront of R&D into nanoelectronics, this book neatly links the underlying technological principles with present and future applications. A brief introduction is followed by an overview of present and emerging logic devices, memories and power technologies. Specific chapters are dedicated to the enabling factors, such as new materials, characterization techniques, smart manufacturing and advanced circuit design. The second part of the book provides detailed coverage of the current state and showcases real future applications in a wide range of fields: safety, transport, medicine, environment, manufacturing, and social life, including an analysis of emerging trends in the internet of things and cyber-physical systems. A survey of main economic factors and trends concludes the book. Highlighting the importance of nanoelectronics in the core fields of communication and information technology, this is essential reading for materials scientists, electronics and electrical engineers, as well as those working in the semiconductor and sensor industries.

Subsecond Annealing of Advanced Materials

Subsecond Annealing of Advanced Materials Book
Author : Wolfgang Skorupa,Heidemarie Schmidt
Publisher : Springer Science & Business Media
Release : 2013-12-16
ISBN : 3319031317
Language : En, Es, Fr & De

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Book Description :

The thermal processing of materials ranges from few fem to seconds by Swift Heavy Ion Implantation to about one second using advanced Rapid Thermal Annealing. This book offers after an historical excursus selected contributions on fundamental and applied aspects of thermal processing of classical elemental semiconductors and other advanced materials including nanostructures with novel optoelectronic, magnetic, and superconducting properties. Special emphasis is given on the diffusion and segregation of impurity atoms during thermal treatment. A broad range of examples describes the solid phase and/or liquid phase processing of elemental and compound semiconductors, dielectric composites and organic materials.

Temperature Measurement during Millisecond Annealing

Temperature Measurement during Millisecond Annealing Book
Author : Denise Reichel
Publisher : Springer
Release : 2016-01-07
ISBN : 365811388X
Language : En, Es, Fr & De

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Book Description :

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

Spectroscopic Characterization Techniques for Semiconductor Technology

Spectroscopic Characterization Techniques for Semiconductor Technology Book
Author : Robert S. Bauer
Publisher : Unknown
Release : 1984
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Spectroscopic Characterization Techniques for Semiconductor Technology book written by Robert S. Bauer, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Nanoscience and Technology

Nanoscience and Technology Book
Author : Chun Li Bai,Si Shen Xie,Xing Zhu
Publisher : Trans Tech Publications Ltd
Release : 2007-03-15
ISBN : 3038131385
Language : En, Es, Fr & De

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Book Description :

Volume is indexed by Thomson Reuters CPCI-S (WoS). Nanotechnology has been a priority research field in many countries, because new discoveries in this field have the potential power to unravel new phenomena and new principles of materials use. This collection of knowledge concerning frontier issues in nanotechnology will aid the further promotion of the integration of nanotechnology and industry.