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Interface Engineering Of Capacitive Micromachined Ultrasonic Transducers For Medical Applications

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Interface Engineering of Capacitive Micromachined Ultrasonic Transducers for Medical Applications

Interface Engineering of Capacitive Micromachined Ultrasonic Transducers for Medical Applications Book
Author : Anonim
Publisher : Stanford University
Release : 2011
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Capacitive micromachined ultrasonic transducers (CMUTs), have been widely studied in academia and industry over the last decade. CMUTs provide many benefits over traditional piezoelectric transducers including improvement in performance through wide bandwidth, and ease of electronics integration, with the potential to batch fabricate very large 2D arrays with low-cost and high-yield. Though many aspects of CMUT technology have been studied over the years, packaging the CMUT into a fully practical system has not been thoroughly explored. Two important interfaces of packaging that this thesis explores are device encapsulation (the interface between CMUTs and patients) and full electronic integration of large scale 2D arrays (the interface between CMUTs and electronics). In the first part of the work, I investigate the requirements for the CMUT encapsulation. For medical usage, encapsulation is needed to electrically insulate the device, mechanically protect the device, and maintain transducer performance, especially the access of the ultrasound energy. While hermetic sealing can protect many other MEMS devices, CMUTs require mechanical interaction to a fluid, which makes fulfilling the previous criterion very challenging. The proposed solution is to use a viscoelastic material with the glass-transition-temperature lower than room temperature, such as Polydimethylsiloxane (PDMS), to preserve the CMUT static and dynamic performance. Experimental implementation of the encapsulated imaging CMUT arrays shows the device performance was maintained; 95 % of efficiency, 85% of the maximum output pressure, and 91% of the fractional bandwidth (FBW) can be preserved. A viscoelastic finite element model was also developed and shows the performance effects of the coating can be accurately predicted. Four designs, providing acoustic crosstalk suppression, flexible substrate, lens focusing, and blood flow monitoring using PDMS layer were also demonstrated. The second part of the work, presents contributions towards the electronic integration and packaging of large-area 2-D arrays. A very large 2D array is appealing for it can enable advanced novel imaging applications, such as a reconfigurable array, and a compression plate for breast cancer screening. With these goals in mind, I developed the first large-scale fully populated and integrated 2D CMUTs array with 32 by 192 elements. In this study, I demonstrate a flexible and reliable integration approach by successfully combining a simple UBM preparation technique and a CMUTs-interposer-ASICs sandwich design. The results show high shear strength of the UBM (26.5 g), 100% yield of the interconnections, and excellent CMUT resonance uniformity (σ = 0.02 MHz). As demonstrated, this allows for a large-scale assembly of a tile-able array by using an interposer. Interface engineering is crucial towards the development of CMUTs into a practical ultrasound system. With the advances in encapsulation technique with a viscoelastic polymer and the combination of the UBM technique to the TSV fabrication for electronics integration, a fully integrated CMUT system can be realized.

Interface Engineering of Capacitive Micromachined Ultrasonic Transducers for Medical Applications

Interface Engineering of Capacitive Micromachined Ultrasonic Transducers for Medical Applications Book
Author : Der-Song Lin
Publisher : Unknown
Release : 2011
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Capacitive micromachined ultrasonic transducers (CMUTs), have been widely studied in academia and industry over the last decade. CMUTs provide many benefits over traditional piezoelectric transducers including improvement in performance through wide bandwidth, and ease of electronics integration, with the potential to batch fabricate very large 2D arrays with low-cost and high-yield. Though many aspects of CMUT technology have been studied over the years, packaging the CMUT into a fully practical system has not been thoroughly explored. Two important interfaces of packaging that this thesis explores are device encapsulation (the interface between CMUTs and patients) and full electronic integration of large scale 2D arrays (the interface between CMUTs and electronics). In the first part of the work, I investigate the requirements for the CMUT encapsulation. For medical usage, encapsulation is needed to electrically insulate the device, mechanically protect the device, and maintain transducer performance, especially the access of the ultrasound energy. While hermetic sealing can protect many other MEMS devices, CMUTs require mechanical interaction to a fluid, which makes fulfilling the previous criterion very challenging. The proposed solution is to use a viscoelastic material with the glass-transition-temperature lower than room temperature, such as Polydimethylsiloxane (PDMS), to preserve the CMUT static and dynamic performance. Experimental implementation of the encapsulated imaging CMUT arrays shows the device performance was maintained; 95 % of efficiency, 85% of the maximum output pressure, and 91% of the fractional bandwidth (FBW) can be preserved. A viscoelastic finite element model was also developed and shows the performance effects of the coating can be accurately predicted. Four designs, providing acoustic crosstalk suppression, flexible substrate, lens focusing, and blood flow monitoring using PDMS layer were also demonstrated. The second part of the work, presents contributions towards the electronic integration and packaging of large-area 2-D arrays. A very large 2D array is appealing for it can enable advanced novel imaging applications, such as a reconfigurable array, and a compression plate for breast cancer screening. With these goals in mind, I developed the first large-scale fully populated and integrated 2D CMUTs array with 32 by 192 elements. In this study, I demonstrate a flexible and reliable integration approach by successfully combining a simple UBM preparation technique and a CMUTs-interposer-ASICs sandwich design. The results show high shear strength of the UBM (26.5 g), 100% yield of the interconnections, and excellent CMUT resonance uniformity ([lowercase Sigma] = 0.02 MHz). As demonstrated, this allows for a large-scale assembly of a tile-able array by using an interposer. Interface engineering is crucial towards the development of CMUTs into a practical ultrasound system. With the advances in encapsulation technique with a viscoelastic polymer and the combination of the UBM technique to the TSV fabrication for electronics integration, a fully integrated CMUT system can be realized.

Medical Imaging

Medical Imaging Book
Author : Troy Farncombe,Kris Iniewski
Publisher : CRC Press
Release : 2017-12-19
ISBN : 1466582634
Language : En, Es, Fr & De

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Book Description :

The book has two intentions. First, it assembles the latest research in the field of medical imaging technology in one place. Detailed descriptions of current state-of-the-art medical imaging systems (comprised of x-ray CT, MRI, ultrasound, and nuclear medicine) and data processing techniques are discussed. Information is provided that will give interested engineers and scientists a solid foundation from which to build with additional resources. Secondly, it exposes the reader to myriad applications that medical imaging technology has enabled.

Diagnostic Ultrasound Imaging Inside Out

Diagnostic Ultrasound Imaging  Inside Out Book
Author : Thomas L. Szabo
Publisher : Academic Press
Release : 2013-12-05
ISBN : 012396542X
Language : En, Es, Fr & De

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Book Description :

Diagnostic Ultrasound Imaging provides a unified description of the physical principles of ultrasound imaging, signal processing, systems and measurements. This comprehensive reference is a core resource for both graduate students and engineers in medical ultrasound research and design. With continuing rapid technological development of ultrasound in medical diagnosis, it is a critical subject for biomedical engineers, clinical and healthcare engineers and practitioners, medical physicists, and related professionals in the fields of signal and image processing. The book contains 17 new and updated chapters covering the fundamentals and latest advances in the area, and includes four appendices, 450 figures (60 available in color on the companion website), and almost 1,500 references. In addition to the continual influx of readers entering the field of ultrasound worldwide who need the broad grounding in the core technologies of ultrasound, this book provides those already working in these areas with clear and comprehensive expositions of these key new topics as well as introductions to state-of-the-art innovations in this field. Enables practicing engineers, students and clinical professionals to understand the essential physics and signal processing techniques behind modern imaging systems as well as introducing the latest developments that will shape medical ultrasound in the future Suitable for both newcomers and experienced readers, the practical, progressively organized applied approach is supported by hands-on MATLAB® code and worked examples that enable readers to understand the principles underlying diagnostic and therapeutic ultrasound Covers the new important developments in the use of medical ultrasound: elastography and high-intensity therapeutic ultrasound. Many new developments are comprehensively reviewed and explained, including aberration correction, acoustic measurements, acoustic radiation force imaging, alternate imaging architectures, bioeffects: diagnostic to therapeutic, Fourier transform imaging, multimode imaging, plane wave compounding, research platforms, synthetic aperture, vector Doppler, transient shear wave elastography, ultrafast imaging and Doppler, functional ultrasound and viscoelastic models

Endorobotics

Endorobotics Book
Author : Luigi Manfredi
Publisher : Academic Press
Release : 2022-01-04
ISBN : 012821760X
Language : En, Es, Fr & De

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Book Description :

The book comprises three parts. The first part provides the state-of-the-art of robots for endoscopy (endorobots), including devices already available in the market and those that are still at the R&D stage. The second part focusses on the engineering design; it includes the use of polymers for soft robotics, comparing their advantages and limitations with those of their more rigid counterparts. The third part includes the project management of a multidisciplinary team, the health cost of current technology, and how a cost-effective device can have a substantial impact on the market. It also includes information on data governance, ethical and legal frameworks, and all steps needed to make this new technology available. Focuses on a new design paradigm for endorobots applications Provides a unique collection of engineering, medical and management contributions for endorobotics design Describes endorobotics, starting from available devices in both clinical use and academia

Transducers and Arrays for Underwater Sound

Transducers and Arrays for Underwater Sound Book
Author : Charles Sherman,John Butler
Publisher : Springer Science & Business Media
Release : 2007-01-05
ISBN : 0387331395
Language : En, Es, Fr & De

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Book Description :

The most comprehensive book on electroacoustic transducers and arrays for underwater sound Includes transducer modeling techniques and transducer designs that are currently in use Includes discussion and analysis of array interaction and nonlinear effects in transducers Contains extensive data in figures and tables needed in transducer and array design Written at a level that will be useful to students as well as to practicing engineers and scientists

Piezoelectric and Acoustic Materials for Transducer Applications

Piezoelectric and Acoustic Materials for Transducer Applications Book
Author : Ahmad Safari,E. Koray Akdogan
Publisher : Springer Science & Business Media
Release : 2008-09-11
ISBN : 0387765409
Language : En, Es, Fr & De

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Book Description :

The book discusses the underlying physical principles of piezoelectric materials, important properties of ferroelectric/piezoelectric materials used in today’s transducer technology, and the principles used in transducer design. It provides examples of a wide range of applications of such materials along with the appertaining rationales. With contributions from distinguished researchers, this is a comprehensive reference on all the pertinent aspects of piezoelectric materials.

Handbook of Modern Sensors

Handbook of Modern Sensors Book
Author : Jacob Fraden
Publisher : Springer Science & Business Media
Release : 2006-04-29
ISBN : 0387216049
Language : En, Es, Fr & De

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Book Description :

Seven years have passed since the publication of the previous edition of this book. During that time, sensor technologies have made a remarkable leap forward. The sensitivity of the sensors became higher, the dimensions became smaller, the sel- tivity became better, and the prices became lower. What have not changed are the fundamental principles of the sensor design. They are still governed by the laws of Nature. Arguably one of the greatest geniuses who ever lived, Leonardo Da Vinci, had his own peculiar way of praying. He was saying, “Oh Lord, thanks for Thou do not violate your own laws. ” It is comforting indeed that the laws of Nature do not change as time goes by; it is just our appreciation of them that is being re?ned. Thus, this new edition examines the same good old laws of Nature that are employed in the designs of various sensors. This has not changed much since the previous edition. Yet, the sections that describe the practical designs are revised substantially. Recent ideas and developments have been added, and less important and nonessential designs were dropped. Probably the most dramatic recent progress in the sensor technologies relates to wide use of MEMS and MEOMS (micro-electro-mechanical systems and micro-electro-opto-mechanical systems). These are examined in this new edition with greater detail. This book is about devices commonly called sensors. The invention of a - croprocessor has brought highly sophisticated instruments into our everyday lives.

Handbook of Force Transducers

Handbook of Force Transducers Book
Author : Dan Mihai Stefanescu
Publisher : Springer Science & Business Media
Release : 2011-03-16
ISBN : 3642182968
Language : En, Es, Fr & De

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Book Description :

Part I introduces the basic "Principles and Methods of Force Measurement" according to a classification into a dozen of force transducers types: resistive, inductive, capacitive, piezoelectric, electromagnetic, electrodynamic, magnetoelastic, galvanomagnetic (Hall-effect), vibrating wires, (micro)resonators, acoustic and gyroscopic. Two special chapters refer to force balance techniques and to combined methods in force measurement. Part II discusses the "(Strain Gauge) Force Transducers Components", evolving from the classical force transducer to the digital / intelligent one, with the incorporation of three subsystems (sensors, electromechanics and informatics). The elastic element (EE) is the "heart" of the force transducer and basically determines its performance. A 12-type elastic element classification is proposed (stretched / compressed column or tube, bending beam, bending and/or torsion shaft, middle bent bar with fixed ends, shear beam, bending ring, yoke or frame, diaphragm, axial-stressed torus, axisymmetrical and voluminous EE), with emphasis on the optimum location of the strain gauges. The main properties of the associated Wheatstone bridge, best suited for the parametrical transducers, are examined, together with the appropriate electronic circuits for SGFTs. The handbook fills a gap in the field of Force Measurement, both experts and newcomers, no matter of their particular interest, finding a lot of useful and valuable subjects in the area of Force Transducers; in fact, it is the first specialized monograph in this inter- and multidisciplinary field.

Sensors and Microsystems

Sensors and Microsystems Book
Author : G. Di Francia,C. Di Natale,B. Alfano,S. De Vito,E. Esposito,G. Fattoruso,F. Formisano,E. Massera,M. L. Miglietta,T. Polichetti
Publisher : Springer Nature
Release : 2020-02-21
ISBN : 3030375587
Language : En, Es, Fr & De

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Book Description :

This book showcases the state of the art in the field of sensors and microsystems, revealing the impressive potential of novel methodologies and technologies. It covers a broad range of aspects, including: bio-, physical and chemical sensors; actuators; micro- and nano-structured materials; mechanisms of interaction and signal transduction; polymers and biomaterials; sensor electronics and instrumentation; analytical microsystems, recognition systems and signal analysis; and sensor networks, as well as manufacturing technologies, environmental, food and biomedical applications. The book gathers a selection of papers presented at the 20th AISEM National Conference on Sensors and Microsystems, held in Naples, Italy in February 2019, the event brought together researchers, end users, technology teams and policy makers.

Health Monitoring of Structural and Biological Systems 2007

Health Monitoring of Structural and Biological Systems 2007 Book
Author : Tribikram Kundu
Publisher : Society of Photo Optical
Release : 2007
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Electromechanical Transducers and Wave Filters

Electromechanical Transducers and Wave Filters Book
Author : Warren Perry Mason
Publisher : Unknown
Release : 1942
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Electromechanical Transducers and Wave Filters book written by Warren Perry Mason, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Microstereolithography and Other Fabrication Techniques for 3D MEMS

Microstereolithography and Other Fabrication Techniques for 3D MEMS Book
Author : Vijay K. Varadan,Xiaoning Jiang,V. V. Varadan
Publisher : John Wiley & Sons Incorporated
Release : 2001-03-30
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides: * A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques * Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units * Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding * Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.

Advancements and Breakthroughs in Ultrasound Imaging

Advancements and Breakthroughs in Ultrasound Imaging Book
Author : G P P Gunarathne
Publisher : BoD – Books on Demand
Release : 2013-06-05
ISBN : 9535111590
Language : En, Es, Fr & De

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Book Description :

Ultrasonic imaging is a powerful diagnostic tool available to medical practitioners, engineers and researchers today. Due to the relative safety, and the non-invasive nature, ultrasonic imaging has become one of the most rapidly advancing technologies. These rapid advances are directly related to the parallel advancements in electronics, computing, and transducer technology together with sophisticated signal processing techniques. This book focuses on state of the art developments in ultrasonic imaging applications and underlying technologies presented by leading practitioners and researchers from many parts of the world.

Piezoelectric MEMS Resonators

Piezoelectric MEMS Resonators Book
Author : Harmeet Bhugra,Gianluca Piazza
Publisher : Springer
Release : 2017-01-09
ISBN : 3319286889
Language : En, Es, Fr & De

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Book Description :

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Basic Physics of Ultrasonographic Imaging

Basic Physics of Ultrasonographic Imaging Book
Author : N. M. Tole,WHO/Diagnostic Imaging and Laboratory Technology
Publisher : World Health Organization
Release : 2005
ISBN : 9789241592994
Language : En, Es, Fr & De

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Book Description :

The present volume on basic physics of ultrasonographic imaging procedures provides clear and concise information on the physics behind ultrasound examinations in diagnostic imaging. It attempts to present the subject from a simple approach that should make it possible for the target groups to comprehend the important concepts which form the physical basis of ultrasonic imaging. The main target group of this manual is radiological technologists and radiographers working with diagnostic ultrasound in developing countries. Clinicians and nurse practitioners may also find the simple presentation appealing. A conscious effort has been made to avoid detailed mathematical treatment of the subject. The emphasis is on simplicity.

Interdigital Sensors

Interdigital Sensors Book
Author : Subhas Chandra Mukhopadhyay,Boby George,Joyanta Kumar Roy,Tarikul Islam
Publisher : Springer Nature
Release : 2021-02-15
ISBN : 3030626849
Language : En, Es, Fr & De

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Book Description :

The book highlights the research contributions of the interdigitated (IDT) sensors over a period of two decades in the field of sensing technology. It presents theory, design, and practical realization of the IDT sensors working over wide frequency rage for scientific, industrial, and consumer applications. The IDT sensors have been widely investigated for wide range of sensing applications including agriculture, environmental monitoring, structural health monitoring, health care, food and beverage testing, testing of dielectric material, proximity sensing, microfluidic application, automatic dispensing system etc. Hence, importance of IDT sensors is growing continuously for future applications. As such, it offers a key reference guide on IDT sensors for students, applied physicists, material scientists, engineers, sensors designers and technicians.

Sensor Technologies

Sensor Technologies Book
Author : Michael J. McGrath,Cliodhna Ni Scanaill,Dawn Nafus
Publisher : Apress
Release : 2014-01-23
ISBN : 1430260149
Language : En, Es, Fr & De

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Book Description :

Sensor Technologies: Healthcare, Wellness and Environmental Applications explores the key aspects of sensor technologies, covering wired, wireless, and discrete sensors for the specific application domains of healthcare, wellness and environmental sensing. It discusses the social, regulatory, and design considerations specific to these domains. The book provides an application-based approach using real-world examples to illustrate the application of sensor technologies in a practical and experiential manner. The book guides the reader from the formulation of the research question, through the design and validation process, to the deployment and management phase of sensor applications. The processes and examples used in the book are primarily based on research carried out by Intel or joint academic research programs. “Sensor Technologies: Healthcare, Wellness and Environmental Applications provides an extensive overview of sensing technologies and their applications in healthcare, wellness, and environmental monitoring. From sensor hardware to system applications and case studies, this book gives readers an in-depth understanding of the technologies and how they can be applied. I would highly recommend it to students or researchers who are interested in wireless sensing technologies and the associated applications.” Dr. Benny Lo Lecturer, The Hamlyn Centre, Imperial College of London “This timely addition to the literature on sensors covers the broad complexity of sensing, sensor types, and the vast range of existing and emerging applications in a very clearly written and accessible manner. It is particularly good at capturing the exciting possibilities that will occur as sensor networks merge with cloud-based ‘big data’ analytics to provide a host of new applications that will impact directly on the individual in ways we cannot fully predict at present. It really brings this home through the use of carefully chosen case studies that bring the overwhelming concept of 'big data' down to the personal level of individual life and health.” Dermot Diamond Director, National Centre for Sensor Research, Principal Investigator, CLARITY Centre for Sensor Web Technologies, Dublin City University "Sensor Technologies: Healthcare, Wellness and Environmental Applications takes the reader on an end-to-end journey of sensor technologies, covering the fundamentals from an engineering perspective, introducing how the data gleaned can be both processed and visualized, in addition to offering exemplar case studies in a number of application domains. It is a must-read for those studying any undergraduate course that involves sensor technologies. It also provides a thorough foundation for those involved in the research and development of applied sensor systems. I highly recommend it to any engineer who wishes to broaden their knowledge in this area!" Chris Nugent Professor of Biomedical Engineering, University of Ulster

Electronic Portable Instruments

Electronic Portable Instruments Book
Author : Halit Eren
Publisher : CRC Press
Release : 2003-10-16
ISBN : 9780203486931
Language : En, Es, Fr & De

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Book Description :

With the availability of advanced technologies, digital systems, and communications, portable instruments are rapidly evolving from simple, stand alone, low-accuracy measuring instruments to complex multifunctional, network integrated, high-performance digital devices with advanced interface capabilities. The relatively brief treatments these instruments receive in many books are no longer adequate. Designers, engineers and scientists need a comprehensive reference dedicated to electronic portable instruments that explains the state-of-art and future directions. Electronic Portable Instruments: Design and Applications introduces the basic measurement and instrumentation concepts, describes the operating principles, and discusses the typical specifications of three main groups of portable instruments: Portable and handheld instruments built for specific applications Intelligent sensor-based devices with few components and dedicated features, such as implantable medical devices Portable data systems containing fixed sensors and supporting mechanisms, but equipped with advanced communications capabilities, such as mobile weather stations The author discusses sensors suitable for these instruments, addresses how components are selected, and clearly shows that instrument design centers on trade-offs between costs, performance, size and weight, power consumption, interface options, ruggedness, and the ability to operate in a range of environments. A multitude of tables, formulae, and figures--many in full color--enhance the presentation. Numerous examples of applications demonstrate the current diversity of these devices and point the way to future trends in development and applications.

Thin Plates and Shells

Thin Plates and Shells Book
Author : Eduard Ventsel,Theodor Krauthammer
Publisher : CRC Press
Release : 2001-08-24
ISBN : 9780203908723
Language : En, Es, Fr & De

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Book Description :

Presenting recent principles of thin plate and shell theories, this book emphasizes novel analytical and numerical methods for solving linear and nonlinear plate and shell dilemmas, new theories for the design and analysis of thin plate-shell structures, and real-world numerical solutions, mechanics, and plate and shell models for engineering appli