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Handbook Of Thin Film Deposition

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Handbook of Thin Film Deposition

Handbook of Thin Film Deposition Book
Author : Krishna Seshan
Publisher : William Andrew
Release : 2012-12-06
ISBN : 1437778747
Language : En, Es, Fr & De

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Book Description :

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned ‘Moore’s Law’ relating to the technology development cycle in the semiconductor industry

Handbook of Thin Film Deposition Processes and Techniques

Handbook of Thin Film Deposition Processes and Techniques Book
Author : Krishna Seshan
Publisher : William Andrew
Release : 2001-02-01
ISBN : 0815517785
Language : En, Es, Fr & De

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Book Description :

New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Handbook of Thin film Deposition Processes and Techniques

Handbook of Thin film Deposition Processes and Techniques Book
Author : Klaus K. Schuegraf
Publisher : William Andrew
Release : 1988
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

The most recent developments and techniques in thin film deposition for high technology applications are described by 23 authorities in the field.

Handbook of Thin Film Technology

Handbook of Thin Film Technology Book
Author : Hartmut Frey,Hamid R. Khan
Publisher : Springer Science & Business Media
Release : 2015-05-06
ISBN : 3642054307
Language : En, Es, Fr & De

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Book Description :

“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Handbook of Thin Film Materials Deposition and processing of thin films

Handbook of Thin Film Materials  Deposition and processing of thin films Book
Author : Hari Singh Nalwa
Publisher : Unknown
Release : 2002
ISBN : 9780125129091
Language : En, Es, Fr & De

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Book Description :

Vol.1: Deposition and processing of thin films; Vol.2: Characterization and spectroscopy of thin films; Vol.3: Ferroelectric and dielectric thin films; Vol.4: Semiconductor and superconductor thin films; Vol.5: Nanomaterials and magnetic thin flims

Handbook of Thin Film Materials Ferroelectric and dielectric thin films

Handbook of Thin Film Materials  Ferroelectric and dielectric thin films Book
Author : Hari Singh Nalwa
Publisher : Unknown
Release : 2002
ISBN : 9780125129114
Language : En, Es, Fr & De

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Book Description :

Vol.1: Deposition and processing of thin films; Vol.2: Characterization and spectroscopy of thin films; Vol.3: Ferroelectric and dielectric thin films; Vol.4: Semiconductor and superconductor thin films; Vol.5: Nanomaterials and magnetic thin flims

Handbook of Thin Film Process Technology

Handbook of Thin Film Process Technology Book
Author : David A. Glocker
Publisher : Unknown
Release : 1995
ISBN : 9780750303118
Language : En, Es, Fr & De

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Book Description :

Download Handbook of Thin Film Process Technology book written by David A. Glocker, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Handbook of Thin Film Materials Characterization and spectroscopy of thin films

Handbook of Thin Film Materials  Characterization and spectroscopy of thin films Book
Author : Hari Singh Nalwa
Publisher : Unknown
Release : 2002
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Vol.1: Deposition and processing of thin films; Vol.2: Characterization and spectroscopy of thin films; Vol.3: Ferroelectric and dielectric thin films; Vol.4: Semiconductor and superconductor thin films; Vol.5: Nanomaterials and magnetic thin flims

Handbook of Thin Films Five Volume Set

Handbook of Thin Films  Five Volume Set Book
Author : Hari Singh Nalwa
Publisher : Elsevier
Release : 2001-11-17
ISBN : 0080533248
Language : En, Es, Fr & De

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Book Description :

This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

Thin Film Processes II

Thin Film Processes II Book
Author : Werner Kern
Publisher : Elsevier
Release : 2012-12-02
ISBN : 0080524214
Language : En, Es, Fr & De

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Book Description :

This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Provides an all-new sequel to the 1978 classic, Thin Film Processes Introduces new topics, and several key topics presented in the original volume are updated Emphasizes practical applications of major thin film deposition and etching processes Helps readers find the appropriate technology for a particular application

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings Book
Author : Peter M. Martin
Publisher : William Andrew
Release : 2009-12-01
ISBN : 0815520328
Language : En, Es, Fr & De

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Book Description :

This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications. * Explains in depth the many recent i

Handbook of Thin Film Materials Semiconductor and superconductor thin films

Handbook of Thin Film Materials  Semiconductor and superconductor thin films Book
Author : Hari Singh Nalwa
Publisher : Unknown
Release : 2002
ISBN : 9780125129121
Language : En, Es, Fr & De

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Book Description :

Vol.1: Deposition and processing of thin films; Vol.2: Characterization and spectroscopy of thin films; Vol.3: Ferroelectric and dielectric thin films; Vol.4: Semiconductor and superconductor thin films; Vol.5: Nanomaterials and magnetic thin flims

Handbook of Thin Film Materials Nanomaterials and magnetic thin films

Handbook of Thin Film Materials  Nanomaterials and magnetic thin films Book
Author : Hari Singh Nalwa
Publisher : Unknown
Release : 2002
ISBN : 9780125129138
Language : En, Es, Fr & De

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Book Description :

Vol.1: Deposition and processing of thin films; Vol.2: Characterization and spectroscopy of thin films; Vol.3: Ferroelectric and dielectric thin films; Vol.4: Semiconductor and superconductor thin films; Vol.5: Nanomaterials and magnetic thin flims

Handbook of Optical Properties

Handbook of Optical Properties Book
Author : Rolf E. Hummel,Karl H. Guenther
Publisher : CRC Press
Release : 1995-02-24
ISBN : 9780849324840
Language : En, Es, Fr & De

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Book Description :

Thin Films for Optical Coating emphasizes the applications of thin films, deposition of thin films, and thin film characterization. Unlike monographs on this subject, this book presents the views of many expert authors. Individual chapters span a wide arc of topics within this field of study. The book offers an introduction to usual and unusual applications of optical thin films, treating in a more qualitative way general topics such as anticounterfeiting coatings, decorative coatings, light switches, contrast enhancement coatings, multiplexers, optical memories, and more. Contributors review thin film media for optical data storage, UV broadband and narrow-band filters, and optically active thin film coatings. Ion beam sputtering and magnetron sputtering deposition methods are described in detail. Characterization techniques are provided, including Raman spectroscopy and absorption measurements. The book also offers theories on light scattering of thin dielectric films and the electromagnetic properties of nanocermet thin films. This reference incorporates recent research by the individual authors with their views of current developments in their respective fields. Of particular interest to the reader will be an assessment of the historical developments of thin film physics written by one of the fathers of thin film technology, Professor M. Auwärter.

Thin Film Technology Handbook

Thin Film Technology Handbook Book
Author : Aicha Elshabini,Aicha Elshabini-Riad,Fred D. Barlow,Fred D Barlow,Ishn
Publisher : McGraw Hill Professional
Release : 1998
ISBN : 9780070190252
Language : En, Es, Fr & De

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Book Description :

The most comprehensive source available on the preparation, characterization, and emerging applications of thin film. This book features extensive new advances applied in multichip modules (MCMs), and covers the basic principles and applications of thin film deposition techniques for practical use. It provides and develops design guidelines to realize multilayer structures in microcircuits, thus addressing a critical and rapidly growing area.

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology Book
Author : Kiyotaka Wasa,Isaku Kanno,Hidetoshi Kotera
Publisher : William Andrew
Release : 2012
ISBN : 1437734839
Language : En, Es, Fr & De

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Book Description :

Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level to a substrate and create a thin film. Several types of sputtering processes exist, including: ion beam, diode, and magnetron sputtering. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallic coatings. High temperature, diamond films and ferroelectric materials are other applications. Sputtering applications are important across a wide range of industries, including the automotive, medical, semiconductors, space, plastics, and military sectors. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.

Optical Thin Films

Optical Thin Films Book
Author : James D. Rancourt
Publisher : SPIE Press
Release : 1996
ISBN : 9780819422859
Language : En, Es, Fr & De

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Book Description :

Practical, user-oriented reference for engineers who must incorporate and specify coatings for filters, antiglare effects, polarization, or other purposes in optical or electro-optical systems design. It focuses on preparation techniques and characteristics of commercially available products and provides information needed to determine what type of filter is needed to solve a particular problem, what its limitations are, and how to care for it.

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings Book
Author : Rointan Framroze Bunshah
Publisher : William Andrew
Release : 1994
ISBN : 0815513372
Language : En, Es, Fr & De

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Book Description :

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.

Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies

Chemical Physics of Thin Film Deposition Processes for Micro  and Nano Technologies Book
Author : Y. Pauleau
Publisher : Springer Science & Business Media
Release : 2012-12-06
ISBN : 940100353X
Language : En, Es, Fr & De

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Book Description :

An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.

Handbook of Semiconductor Manufacturing Technology

Handbook of Semiconductor Manufacturing Technology Book
Author : Yoshio Nishi,Robert Doering
Publisher : CRC Press
Release : 2017-12-19
ISBN : 1420017667
Language : En, Es, Fr & De

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Book Description :

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.