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Handbook Of Sputter Deposition Technology

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Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology Book
Author : Kiyotaka Wasa,Isaku Kanno,Hidetoshi Kotera
Publisher : William Andrew
Release : 2012
ISBN : 1437734839
Language : En, Es, Fr & De

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Book Description :

Sputtering is a Physical Vapor Deposition vacuum process used to deposit very thin films onto a substrate for a wide variety of commercial and scientific purposes. Sputtering occurs when an ionized gas molecule is used to displace atoms of a specific material. These atoms then bond at the atomic level to a substrate and create a thin film. Several types of sputtering processes exist, including: ion beam, diode, and magnetron sputtering. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallic coatings. High temperature, diamond films and ferroelectric materials are other applications. Sputtering applications are important across a wide range of industries, including the automotive, medical, semiconductors, space, plastics, and military sectors. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique. 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.

Handbook of Sputter Deposition Technology

Handbook of Sputter Deposition Technology Book
Author : Shigeru Hayakawa
Publisher : William Andrew Publishing
Release : 1992-01-01
ISBN : 9780815512806
Language : En, Es, Fr & De

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Book Description :

A concise, comprehensive overview of sputter deposition technologyùa key technology for materials research in the next decade. Cathode sputtering is widely used in the microelectronics industry for silicon integrated circuit production and for metallurgical coatings. High temperature superconductors can be synthesized with sputtering under non-equilibrium conditions. Diamond films and ferroelectric materials are other applications.

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings Book
Author : Peter M. Martin
Publisher : William Andrew
Release : 2009-12-01
ISBN : 0815520328
Language : En, Es, Fr & De

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Book Description :

This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications. * Explains in depth the many recent i

Handbook of Deposition Technologies for Films and Coatings

Handbook of Deposition Technologies for Films and Coatings Book
Author : Rointan Framroze Bunshah
Publisher : William Andrew
Release : 1994
ISBN : 0815513372
Language : En, Es, Fr & De

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Book Description :

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.

Handbook of Physical Vapor Deposition PVD Processing

Handbook of Physical Vapor Deposition  PVD  Processing Book
Author : D. M. Mattox
Publisher : Cambridge University Press
Release : 2014-09-19
ISBN : 9780080946580
Language : En, Es, Fr & De

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Book Description :

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Handbook of Thin Film Deposition Processes and Techniques

Handbook of Thin Film Deposition Processes and Techniques Book
Author : Krishna Seshan
Publisher : William Andrew
Release : 2001-02-01
ISBN : 0815517785
Language : En, Es, Fr & De

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Book Description :

New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Handbook of Hard Coatings

Handbook of Hard Coatings Book
Author : Rointan F. Bunshah,Christian Weissmantel
Publisher : Cambridge University Press
Release : 2001
ISBN : 9780815514381
Language : En, Es, Fr & De

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Book Description :

Written by 12 leading experts, this is an essential resource for fabrication, characterization and applications in the field of hard coatings and wear resistant surfaces. Offering complete explanations of commercially oriented deposition technology, from traditional vacuum. Includes a detailed introduction to the science of characterizing and measuring hard coatings.

Handbook of Ion Beam Processing Technology

Handbook of Ion Beam Processing Technology Book
Author : Jerome J. Cuomo,Stephen M. Rossnagel,Harold R. Kaufman,Stephen M. Haber
Publisher : William Andrew
Release : 1989
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Deals with ion beam processing for basic sputter etching of samples, sputter deposition of thin films, the synthesis of material in thin film form, and the modification of the properties of thin films.

Handbook of Ceramics Grinding Polishing

Handbook of Ceramics Grinding   Polishing Book
Author : Ioan D. Marinescu,Hans Kurt Tonshoff,Ichiro Inaski
Publisher : William Andrew
Release : 2000-01-14
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Focusing on the machining of ceramic materials such as silicon nitride, carbide and zirconia, this handbook provides a clear understanding of modern improvements in ceramic processing. The 20 international experts chapter authors describe the properties and characteristics of ceramics, the various types of abrasive processes, and typical tests used in the procedures including cost reduction methods.

Contacts to Semiconductors

Contacts to Semiconductors Book
Author : L. J. Brillson
Publisher : William Andrew
Release : 1993
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

The authors present the state of the art in growing, processing, and characterizing electronic junctions. Overall, they have assembled a broad array of the latest semiconductor interface science and technology, ranging from advanced ohmic, Schottky, and heterojunction contacts to the refined perspectives of microscopic junctions gleaned from ultrahigh vacuum surface science techniques. Considerable progress has been made in these areas over the last few years. This book is intended for technologists and solid state researchers alike.

Ceramic Cutting Tools

Ceramic Cutting Tools Book
Author : E. Dow Whitney
Publisher : William Andrew
Release : 1994
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Interest in ceramics as a high speed cutting tool material is based primarily on favorable material properties. As a class of materials, ceramics possess high melting points, excellent hardness and good wear resistance. Unlike most metals, hardness levels in ceramics generally remain high at elevated temperatures which means that cutting tip integrity is relatively unaffected at high cutting speeds. Ceramics are also chemically inert against most workmetals.

Diamond Films and Coatings

Diamond Films and Coatings Book
Author : Robert F. Davis
Publisher : William Andrew
Release : 1993
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Reviews diamond films and coatings covering their properties, growth, deposition, characterization, and applications.

Handbook of Thin Film Deposition

Handbook of Thin Film Deposition Book
Author : Krishna Seshan
Publisher : William Andrew
Release : 2012-12-06
ISBN : 1437778747
Language : En, Es, Fr & De

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Book Description :

The Handbook of Thin Film Deposition is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, new materials for memory applications and methods for thin film optical processes. In a major restructuring, this edition of the handbook lays the foundations with an up-to-date treatment of lithography, contamination and yield management, and reliability of thin films. The established physical and chemical deposition processes and technologies are then covered, the last section of the book being devoted to more recent technological developments such as microelectromechanical systems, photovoltaic applications, digital cameras, CCD arrays, and optical thin films. A practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance and applications Covers core processes and applications in the semiconductor industry and new developments in the photovoltaic and optical thin film industries The new edition takes covers the transition taking place in the semiconductor world from Al/SiO2 to copper interconnects with low-k dielectrics Written by acknowledged industry experts from key companies in the semiconductor industry including Intel and IBM Foreword by Gordon E. Moore, co-founder of Intel and formulator of the renowned ‘Moore’s Law’ relating to the technology development cycle in the semiconductor industry

Electronic Materials and Processes Handbook

Electronic Materials and Processes Handbook Book
Author : Charles A. Harper
Publisher : McGraw-Hill Professional Publishing
Release : 1994
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Today, the successful design and manufacture of electronic devices requires expertise in both materials science and manufacturing processes. This reference provides electronics engineers and materials scientists with the information they need on the materials and processes currently used to fabricate, interconnect and package electronic components and systems.

Handbook of Thin Film Technology

Handbook of Thin Film Technology Book
Author : Hartmut Frey,Hamid R. Khan
Publisher : Springer Science & Business Media
Release : 2015-05-06
ISBN : 3642054307
Language : En, Es, Fr & De

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Book Description :

“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Smart Structures and Materials

Smart Structures and Materials Book
Author : Anonim
Publisher : Unknown
Release : 1994
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Smart Structures and Materials book written by , available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Optical Thin Films

Optical Thin Films Book
Author : Anonim
Publisher : Unknown
Release : 1994
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Optical Thin Films book written by , available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Medal Lectures 1950 1983

Medal Lectures  1950 1983 Book
Author : Anonim
Publisher : Unknown
Release : 1984
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Medal Lectures 1950 1983 book written by , available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Photomask and Next generation Lithography Mask Technology

Photomask and Next generation Lithography Mask Technology Book
Author : Anonim
Publisher : Unknown
Release : 2003
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Photomask and Next generation Lithography Mask Technology book written by , available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.