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Fabrication And Design Of Resonant Microdevices

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Fabrication and Design of Resonant Microdevices

Fabrication and Design of Resonant Microdevices Book
Author : Behraad Bahreyni
Publisher : William Andrew
Release : 2008
ISBN : 9780815515777
Language : En, Es, Fr & De

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Book Description :

This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined devices will be given. This section is a necessary part of the book as the options during the design of a resonant device strongly depend on how the device is going to be fabricated. Resonant devices are generally two port systems: an input port to excite the structure and cause the resonance and an output port to monitor the behavior of the device. The next two chapters of the book are dedicated to excitation and signal detection methods. An analytic model of the device behavior is one of the most valuable design tools. A chapter is dedicated to this important issue followed by numerical simulation techniques. The book also covers the issues of damping and noise for resonant MEMS. These two topics are of particular importance for high-Q devices. Electronic interfacing and packaging issues are also discussed in separate chapters. The book concludes by giving numerous examples of resonant MEMS from the academia and industry with a brief analysis of them using the material that was presented in the earlier chapters. * Offers numerous academic and industrial examples of resonant MEMS * Provides an analytic model of device behavior * Explains two-port systems in detail * Devotes ample space to excitation and signal detection methods * Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Fabrication Design of Resonant Microdevices

Fabrication   Design of Resonant Microdevices Book
Author : Behraad Bahreyni
Publisher : William Andrew
Release : 2008-10-20
ISBN : 0815519710
Language : En, Es, Fr & De

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Book Description :

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Emerging Nanotechnologies for Manufacturing

Emerging Nanotechnologies for Manufacturing Book
Author : Waqar Ahmed,M. J. Jackson,Mark J Jackson
Publisher : William Andrew
Release : 2009-11-24
ISBN : 9780815519782
Language : En, Es, Fr & De

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Book Description :

Nanotechnology is a technology on the verge of commercialization. In this important work, an unrivalled team of international experts provides an exploration of the emerging nanotechnologies that are poised to make the nano-revolution a reality in the manufacturing sector. From their different perspectives, the contributors explore how developments in nanotechnology are transforming areas as diverse as medicine, advanced materials, energy, electronics and agriculture. Key topics covered include: Characterization of nanostructures Bionanotechnology Nanoelectronics Micro- and nanomachining Self-assembly techniques New applications of carbon nanotubes Environmental and health impacts This book provides an important and in-depth guide to the applications and impact of nanotechnology to different manufacturing sectors. As such, it will find a broad readership, from R&D scientists and engineers to venture capitalists. About the Authors Waqar Ahmed is Chair of Nanotechnology & Advanced Manufacturing and the Director of the Institute of Advanced Manufacturing and Innovation at the University of Central Lancashire, UK. He has contributed to the wider industrial adoption of surface coating solutions through fundamental research and modeling of gas phase processes in CVD and studies of tribological behavior. Mark J. Jackson is a Professor at the Birck Nanotechnology Center and Center for Advanced Manufacturing, College of Technology at Purdue University. Dr Jackson is active in research work concerned with understanding the properties of materials in the field of microscale metal cutting, micro- and nanoabrasive machining, and laser micromachining. He is also involved in developing next generation manufacturing processes and biomedical engineering. • Explains how to use biological pathways to produce nanoelectric devices • Presents data on new, experimental designs • Discusses the history of carbon nanotubes and how they are synthesized to fabricate novel nanostructures (incl. data on laser ablation) • Extensive use of illustrations, tables, and figures throughout

Nanotechnology Applications for Clean Water

Nanotechnology Applications for Clean Water Book
Author : Mamadou Diallo,Jeremiah Duncan
Publisher : William Andrew
Release : 2009
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

"In this truly unique reference, over 80 leading experts from the global scientific community share their research and knowledge to address the global challenges of water quality and remediation in the hopes that nanotechnology can ensure that clean water is available to everyone."--BOOK JACKET.

Book Review Index

Book Review Index Book
Author : Anonim
Publisher : Unknown
Release : 2009
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Book Review Index book written by , available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

MEMS Microshells for Microneedles Microscale Fluid Visualization and Vacuum Packaging of Microdevices

MEMS Microshells for Microneedles  Microscale Fluid Visualization  and Vacuum Packaging of Microdevices Book
Author : Kyle Stanton Lebouitz
Publisher : Unknown
Release : 1998
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download MEMS Microshells for Microneedles Microscale Fluid Visualization and Vacuum Packaging of Microdevices book written by Kyle Stanton Lebouitz, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Design Fabrication and Testing of a MEMS based Tangential Tactor

Design  Fabrication  and Testing of a MEMS based Tangential Tactor Book
Author : Reza Ghodssi
Publisher : Unknown
Release : 1996
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Design Fabrication and Testing of a MEMS based Tangential Tactor book written by Reza Ghodssi, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

MHS 98

MHS 98 Book
Author : Anonim
Publisher : Institute of Electrical & Electronics Engineers(IEEE)
Release : 1998
ISBN : 9780780351301
Language : En, Es, Fr & De

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Book Description :

Micro mechatronics technology is a field of great promise as one of ultimate resource & energy conservation. The advances in techniques & experimental applications described in this international symposium herald a new generation of products, improvement in the quality of life, & development of economic & business opportunities. Also discussed is the development of implantable micro-systems for medical & biological reasons. Partial Contents: Micro Mechatronics & Fabrication Technology; Micro Assembly Technology; Nano Technology; Micro Sensors & Actuators; Micro Robotics; Artificial Life; Swarm Intelligence; Virtual Reality

Silicon Electromechanical Microgrippers

Silicon Electromechanical Microgrippers Book
Author : Chang-Jin Kim
Publisher : Unknown
Release : 1991
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Silicon Electromechanical Microgrippers book written by Chang-Jin Kim, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Ultrasonic Microdevices for Integrated On chip Biological Sample Processing

Ultrasonic Microdevices for Integrated On chip Biological Sample Processing Book
Author : George Michael Dougherty
Publisher : Unknown
Release : 2002
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Ultrasonic Microdevices for Integrated On chip Biological Sample Processing book written by George Michael Dougherty, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Investigation of Potential Platforms for Low Frequency MEMS based Piezoelectric Energy Harvesting

Investigation of Potential Platforms for Low Frequency MEMS based Piezoelectric Energy Harvesting Book
Author : Mehdi Rezaeisaray
Publisher : Unknown
Release : 2014
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

MEMS based energy harvesters have recently been investigated for scavenging, otherwise useless, ambient vibration energy. Piezoelectric materials are fabricated on micro-devices to convert the mechanical vibration energy into electrical energy. The main focus for these harvesters is low frequency (under 500 Hz) ambient vibration which is the source of a fundamental challenge with MEMS oscillators. The smaller the oscillator is, the higher its natural frequencies will become. Various techniques have been proposed to decrease the natural frequency of micro-energy harvesters such as increasing the length of the devices or assembling extra proof mass to the fabricated devices which could potentially affect the mass production of the MEMS devices. Another challenge is that most of the reported piezoelectric energy harvesters in the literature have cantilever designs. These structures have a high mechanical quality factor providing a sharp peak at their resonant frequency. Since microfabricating resonators with a resonant frequency exactly matching their designed value is very challenging, linear cantilever designs seem to be less practical for real applications where excitation frequency could change. Therefore, some techniques in vibration have been adapted to widen the frequency bandwidth of the harvesters. One of the most effective methods to broaden the frequency bandwidth is taking advantage of large deflection effect of oscillators. However, some of the proposed designs such as a fixed-fixed beam design have high resonant frequencies (≥1 kHz), whereas the focus for energy harvesters is low frequency range. In this work, a silicon based structure has been designed and fabricated to carry an electronic chip and potentially provide in-situ supplementary power for it. This design provides capability of harvesting at three different frequencies because the resonant frequencies of this structure at its first three mode shapes are within the low ambient vibration frequency range. The widening frequency bandwidth has been investigated for this design. Natural frequencies as low as 71.8, 84.5, and 188.4 Hz have been measured using a laser vibrometer. A frequency bandwidth of ~10 Hz has been obtained for the 2nd mode shape of the structure under the base excitation of 0.2g. A maximum open circuit voltage of ~1V and maximum power output of 136nW have been obtained using this harvester. In addition, as opposed to the conventional silicon-based harvesters, polymeric materials have been investigated as the main structural material for energy harvesters. Due to the much lower stiffness of polymers compared to silicon, the resonant frequency of the harvesters could be reduced. To prove the concept, a SU-8 (ESU-8=5GPa vs. ESi=160GPa) membrane has been designed and fabricated with Aluminum Nitride harvesting elements. The membrane configuration provides the capability to widen the harvester's frequency bandwidth. Testing results reveal a linear resonant frequency of 381 Hz, frequency bandwidth of 146Hz, maximum output power of 1.37μW, and power density of 3.81 μW/cm2 at the base excitation of 4g with this design. The much lower resonant frequency of polymeric structures compared to the similar silicon-based structures (more than 5 times lower) makes them a strong candidate for the future harvesters. The objective of this thesis is to develop a platform using silicon-based and polymer-based energy harvesters to improve the performance of the energy harvesters by reducing the resonant frequencies and widening the frequency bandwidth. Throughout this research, all stages including design, fabrication, packaging, testing, and characterization of both silicon- and polymer-based harvesters have been developed or adapted for the purpose of this work. Finite element simulations have been conducted to examine the mechanical response of the structures as well as their electrical output at the design stage. A scalable microfabrication process flow has been developed in this work to fabricate piezoelectric layers on SU-8 micro-structures. An improved approach for cleaving fabricated devices from the silicon substrate has been developed to overcome challenges of the dicing process. Various 3-D micro-assembly techniques have been adapted to package the fabricated harvesters. In addition, 3-D printed parts were used to enhance the yield of the packaging and testing stages. This technique could potentially be used for bio-compatible packaging, as well. In conclusion, the polymer-based and wideband energy harvesters seem promising for real applications at low ambient vibration frequencies. This research introduces opportunities to further improve the performance of the harvesters by decreasing their resonant frequencies.

Advanced Microdevices and Space Science Sensors

Advanced Microdevices and Space Science Sensors Book
Author : James A. Cutts
Publisher : Society of Photo Optical
Release : 1994
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Advanced Microdevices and Space Science Sensors book written by James A. Cutts, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

MEMS Design Fabrication Characterization and Packaging

MEMS Design  Fabrication  Characterization  and Packaging Book
Author : Uwe F. W. Behringer,Deepak Uttamchandani
Publisher : Society of Photo Optical
Release : 2001
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download MEMS Design Fabrication Characterization and Packaging book written by Uwe F. W. Behringer,Deepak Uttamchandani, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Microelectromechanical Systems

Microelectromechanical Systems Book
Author : Anonim
Publisher : Unknown
Release : 2004
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Microelectromechanical Systems book written by , available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Fatigue of Polycrystalline Silicon in MEMS Devices

Fatigue of Polycrystalline Silicon in MEMS Devices Book
Author : Angela S. Choy
Publisher : Unknown
Release : 1999
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Fatigue of Polycrystalline Silicon in MEMS Devices book written by Angela S. Choy, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Physics of Semiconductor Devices

Physics of Semiconductor Devices Book
Author : Anonim
Publisher : Unknown
Release : 2002
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Physics of Semiconductor Devices book written by , available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.

Polycrystalline Silicon Germanium for Fabrication Release and Packaging of Microelectromechanical Systems

Polycrystalline Silicon Germanium for Fabrication  Release  and Packaging of Microelectromechanical Systems Book
Author : John McCaslin Heck
Publisher : Unknown
Release : 2001
ISBN : 0987650XXX
Language : En, Es, Fr & De

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Book Description :

Download Polycrystalline Silicon Germanium for Fabrication Release and Packaging of Microelectromechanical Systems book written by John McCaslin Heck, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.