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Ceramic Thick Films For Mems And Microdevices

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Ceramic Thick Films for MEMS and Microdevices

Ceramic Thick Films for MEMS and Microdevices Book
Author : Robert A. Dorey
Publisher : William Andrew
Release : 2011-10-21
ISBN : 1437778178
Language : En, Es, Fr & De

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Book Description :

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups Written by a single author, this book provides a clear, coherently written guide to this important emerging technology Covers materials, fabrication and applications in one book

Surface Functionalized Ceramics

Surface Functionalized Ceramics Book
Author : Laura Treccani,Fabian Meder
Publisher : John Wiley & Sons
Release : 2023-03-06
ISBN : 3527338357
Language : En, Es, Fr & De

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Book Description :

Surface-Functionalized Ceramics Focused coverage of making and using functional ceramic materials for a wide variety of scientific and technical applications Surface-Functionalized Ceramics provides a comprehensive overview of surface functionalization approaches for ceramic materials, including alumina, zirconia, titania, and silica, and their uses as sensors, chemical, and biological probes, chromatographic supports for (bio)molecule purification and analysis, and adsorbents for toxic substances and pollutants. Overall, the text provides a broad picture of the enormous possibilities offered by surface functionalization and addresses the current challenges regarding surface analysis, characterization, and stability. As a well-rounded resource, the text points out opportunities of surface-functionalized ceramics, their issues such as achieving surface stability and complex analysis, and how to counter them. Edited by two experts in the field of advanced materials surfaces, Surface-Functionalized Ceramics covers topics such as: Processing methods for advanced ceramics, surface modification of ceramic materials, and methods for electrokinetic surface characteristics Surface imaging and chemical surface analysis using atomic force microscopy Surface chemical analysis and ceramic-enhanced analytics Biological and living matter-surface interactions including protein adsorption mechanisms as well as bacteria behavior in terms of biofilm formation and prevention for antibacterial applications Mesoporous silica and organosilica biosensors for water quality and environmental monitoring, plus ceramic-based adsorbents in bioproduct recovery and purification For professionals, researchers, and academics in the fields of materials science, biotechnology, biotechnological industry, environmental sciences, and ceramics industry, Surface-Functionalized Ceramics is a one-stop reference on the subject that provides different approaches to obtain surfaces of ceramic materials that perform desired functions.

Magnetic Ferroelectric and Multiferroic Metal Oxides

Magnetic  Ferroelectric  and Multiferroic Metal Oxides Book
Author : Biljana Stojanovic
Publisher : Elsevier
Release : 2018-01-02
ISBN : 012811181X
Language : En, Es, Fr & De

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Book Description :

Magnetic, Ferroelectric, and Multiferroic Metal Oxides covers the fundamental and theoretical aspects of ferroics and magnetoelectrics, their properties, and important technological applications, serving as the most comprehensive, up-to-date reference on the subject. Organized in four parts, Dr. Biljana Stojanovic leads expert contributors in providing the context to understand the material (Part I: Introduction), the theoretical and practical aspects of ferroelectrics (Part II: Ferroelectrics: From Theory, Structure and Preparation to Application), magnetic metal oxides (Part III: Magnetic Oxides: Ferromagnetics, Antiferromagnetics and Ferrimagnetics), multiferroics (Part IV: Multiferroic Metal Oxides) and future directions in research and application (Part V: Future of Metal Oxide Ferroics and Multiferroics). As ferroelectric materials are used to make capacitors with high dielectric constant, transducers, and actuators, and in sensors, reed heads, and memories based on giant magnetoresistive effects, this book will provide an ideal source for the most updated information. Addresses ferroelectrics, ferromagnetics and multiferroelectrics, providing a one-stop reference for researchers Provides fundamental theory and relevant, important technological applications Highlights their use in capacitors with high dielectric constant, transducers, and actuators, and in sensors, reed heads, and memories based on giant magnetoresistive effects

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies Book
Author : Markku Tilli,Mervi Paulasto-Krockel,Teruaki Motooka,Veikko Lindroos
Publisher : William Andrew
Release : 2015-09-02
ISBN : 0323312233
Language : En, Es, Fr & De

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Book Description :

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures Geared towards practical applications rather than theory

Chemically Deposited Nanocrystalline Metal Oxide Thin Films

Chemically Deposited Nanocrystalline Metal Oxide Thin Films Book
Author : Fabian I. Ezema,Chandrakant D. Lokhande,Rajan Jose
Publisher : Springer Nature
Release : 2021-06-26
ISBN : 3030684628
Language : En, Es, Fr & De

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Book Description :

This book guides beginners in the areas of thin film preparation, characterization, and device making, while providing insight into these areas for experts. As chemically deposited metal oxides are currently gaining attention in development of devices such as solar cells, supercapacitors, batteries, sensors, etc., the book illustrates how the chemical deposition route is emerging as a relatively inexpensive, simple, and convenient solution for large area deposition. The advancement in the nanostructured materials for the development of devices is fully discussed.

Electroceramic Based MEMS

Electroceramic Based MEMS Book
Author : Nava Setter
Publisher : Springer Science & Business Media
Release : 2006-03-30
ISBN : 0387233199
Language : En, Es, Fr & De

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Book Description :

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

Biomedical Applications of Microfluidic Devices

Biomedical Applications of Microfluidic Devices Book
Author : Michael R. Hamblin,Mahdi Karimi
Publisher : Academic Press
Release : 2020-11-12
ISBN : 0128187921
Language : En, Es, Fr & De

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Book Description :

Biomedical Applications of Microfluidic Devices introduces the subject of microfluidics and covers the basic principles of design and synthesis of actual microchannels. The book then explores how the devices are coupled to signal read-outs and calibrated, including applications of microfluidics in areas such as tissue engineering, organ-on-a-chip devices, pathogen identification, and drug/gene delivery. This book covers high-impact fields (microarrays, organ-on-a-chip, pathogen detection, cancer research, drug delivery systems, gene delivery, and tissue engineering) and shows how microfluidics is playing a key role in these areas, which are big drivers in biomedical engineering research. This book addresses the fundamental concepts and fabrication methods of microfluidic systems for those who want to start working in the area or who want to learn about the latest advances being made. The subjects covered are also an asset to companies working in this field that need to understand the current state-of-the-art. The book is ideal for courses on microfluidics, biosensors, drug targeting, and BioMEMs, and as a reference for PhD students. The book covers the emerging and most promising areas of biomedical applications of microfluidic devices in a single place and offers a vision of the future. Covers basic principles and design of microfluidics devices Explores biomedical applications to areas such as tissue engineering, organ-on-a-chip, pathogen identification, and drug and gene delivery Includes chemical applications in organic and inorganic chemistry Serves as an ideal text for courses on microfluidics, biosensors, drug targeting, and BioMEMs, as well as a reference for PhD students

Micromixers

Micromixers Book
Author : Nam-Trung Nguyen
Publisher : William Andrew
Release : 2011-09-17
ISBN : 1437735215
Language : En, Es, Fr & De

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Book Description :

The ability to mix minute quantities of fluids is critical in a range of recent and emerging techniques in engineering, chemistry and life sciences, with applications as diverse as inkjet printing, pharmaceutical manufacturing, specialty and hazardous chemical manufacturing, DNA analysis and disease diagnosis. The multidisciplinary nature of this field – intersecting engineering, physics, chemistry, biology, microtechnology and biotechnology – means that the community of engineers and scientists now engaged in developing microfluidic devices has entered the field from a variety of different backgrounds. Micromixers is uniquely comprehensive, in that it deals not only with the problems that are directly related to fluidics as a discipline (aspects such as mass transport, molecular diffusion, electrokinetic phenomena, flow instabilities, etc.) but also with the practical issues of fabricating micomixers and building them into microsystems and lab-on-chip assemblies.With practical applications to the design of systems vital in modern communications, medicine and industry this book has already established itself as a key reference in an emerging and important field. The 2e includes coverage of a broader range of fabrication techniques, additional examples of fully realized devices for each type of micromixer and a substantially extended section on industrial applications, including recent and emerging applications. Introduces the design and applications of micromixers for a broad audience across chemical engineering, electronics and the life sciences, and applications as diverse as lab-on-a-chip, ink jet printing, pharmaceutical manufacturing and DNA analysis Helps engineers and scientists to unlock the potential of micromixers by explaining both the scientific (microfluidics) aspects and the engineering involved in building and using successful microscale systems and devices with micromixers The author's applied approach combines experience-based discussion of the challenges and pitfalls of using micromixers, with proposals for how to overcome them

Emerging Nanotechnologies in Dentistry

Emerging Nanotechnologies in Dentistry Book
Author : Karthikeyan Subramani,Waqar Ahmed
Publisher : William Andrew
Release : 2011-11-15
ISBN : 1455778575
Language : En, Es, Fr & De

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Book Description :

New nanomaterials are leading to a range of emerging dental treatments that utilize more biomimetic materials that more closely duplicate natural tooth structure (or bone, in the case of implants). The use of nanostructures that will work in harmony with the body’s own regenerative processes (eg, to restore tooth structure or alveolar bone) are moving into clinical practice. This book brings together an international team of experts from the fields of nanomaterials, biomedical engineering and dentistry, to cover the new materials and techniques with potential for use intra-orally or extra-orally for the restoration, fixation, replacement, or regeneration of hard and soft tissues in and about the oral cavity and craniofacial region. New dental nanotechnologies include the use of advanced inorganic and organic materials, smart and biomimetic materials, tissue engineering and drug delivery strategies. Book prepared by an interdisciplinary and international group of bio-nanomaterial scientists and dental/oral biomedical researchers Comprehensive professional reference for the subject covering materials fabrication and use of materials for all major diagnostic and therapeutic dental applications – repair,restoration, regeneration, implants and prevention Book focuses in depth on the materials manufacturing processes involved with emphasis on pre-clinical and clinical applications, use and biocompatibility

Nano Optoelectronic Sensors and Devices

Nano Optoelectronic Sensors and Devices Book
Author : Ning Xi,King Lai
Publisher : William Andrew
Release : 2011-10-14
ISBN : 1437734723
Language : En, Es, Fr & De

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Book Description :

Nanophotonics has emerged as a major technology and applications domain, exploiting the interaction of light-emitting and light-sensing nanostructured materials. These devices are lightweight, highly efficient, low on power consumption, and are cost effective to produce. The authors of this book have been involved in pioneering work in manufacturing photonic devices from carbon nanotube (CNT) nanowires and provide a series of practical guidelines for their design and manufacture, using processes such as nano-robotic manipulation and assembly methods. They also introduce the design and operational principles of opto-electrical sensing devices at the nano scale. Thermal annealing and packaging processes are also covered, as key elements in a scalable manufacturing process. Examples of applications of different nanowire based photonic devices are presented. These include applications in the fields of electronics (e.g. FET, CNT Schotty diode) and solar energy. Discusses opto-electronic nanomaterials, characterization and properties from an engineering perspective, enabling the commercialization of key emerging technologies Provides scalable techniques for nanowire structure growth, manipulation and assembly (i.e. synthesis) Explores key application areas such as sensing, electronics and solar energy

Hybrid Plasmonics for Energy Harvesting and Sensing of Radiation and Heat

Hybrid Plasmonics for Energy Harvesting and Sensing of Radiation and Heat Book
Author : Mina Shiran Chaharsoughi
Publisher : Linköping University Electronic Press
Release : 2020-02-03
ISBN : 9179299067
Language : En, Es, Fr & De

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Book Description :

The special optical properties of subwavelength metallic structures have opened up for numerous applications in different fields. The interaction of light with metal nanostructures leads to the excitation of collective oscillations of conduction-band electrons, known as plasmons. These plasmon excitations are responsible for the high absorption and high scattering of light in metallic nanostructures. High absorption of light and the subsequent temperature increase in the nanostructures make them suitable as point-like heat sources that can be controlled remotely by light. The research presented in this thesis focuses on the development and studies of hybrid devices that combine light-induced heating in plasmonic nanostructures with other materials and systems. Particular focus is put on hybrid organic-inorganic systems for applications in energy harvesting as well as in heat and radiation sensing. Harvesting energy from light fluctuations was achieved in a hybrid device consisting of plasmonic gold nanodisk arrays and a pyroelectric copolymer. In this concept, fast and efficient light-induced heating in the gold nanodisks modulated the temperature of the pyroelectric layer, which could be used to extract electrical energy from fluctuations in simulated sunlight. Integrating plasmonic nanostructures with complementary materials can also provide novel hybrid sensors, for monitoring of temperature, heat flux and radiation. In this thesis work, a hybrid sensor was designed based on the combination of a plasmonic gold nanohole layer with a pyroelectric copolymer and an ionic thermoelectric gel. The gold nanohole arrays acted both as broadband light absorbers in the visible to near-infrared spectral range of the solar spectrum and also as one of the electrodes of the sensor. In contrast to the constituent components when used separately, the hybrid sensor could provide both fast and stable signals upon heat or radiation stimuli, as well as enhanced equilibrium signals. Furthermore, a concept for heat and radiation mapping was developed that was highly sensitive and stable despite its simple structure. The concept consisted of a gel-like electrolyte connecting two separated metal nanohole electrodes on a substrate. Resembling traditional thermocouples, this concept could autonomously detect temperature changes but with several orders of magnitudes higher sensitivity. Owing to its promising sensing properties as well as its compatibility with inexpensive mass production methods on flexible substrates, such concept may be particularly interesting for electronic skin applications for health monitoring and for humanoid robotics. Finally, we improved the possibilities for the temperature mapping of the concept by modifying the structure from lateral to vertical form. Similar to the lateral device, the vertical temperature sensor showed high temperature sensitivity and stability in producing signals upon temperature changes.

Packaging Materials and Processing for Food Pharmaceuticals and Cosmetics

Packaging Materials and Processing for Food  Pharmaceuticals and Cosmetics Book
Author : Kata Galic,Mia Kurek,Nasreddine Benbettaieb,Frederic Debeaufort,Mario Scetar
Publisher : John Wiley & Sons
Release : 2021-03-31
ISBN : 1119825067
Language : En, Es, Fr & De

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Book Description :

This book provides valuable information on a range of food packaging topics. It serves as a source for students, professionals and packaging engineers who need to know more about the characteristics, applications and consequences of different packaging materials in food-packaging interactions. This book is divided into 13 chapters and focuses on the agro-food, cosmetics and pharmaceutical sectors. The first four chapters cover traditional packaging materials: wood, paper and cardboard, glass and metal. The next two deal, respectively, with plastics and laminates. Biobased materials are then covered, followed by a presentation of active and smart packaging. Some chapters are also dedicated to providing information on caps and closures as well as auxiliary materials. Different food packaging methods are presented, followed by an investigation into the design and labelling of packaging. The book ends with a chapter presenting information on how the choice of packaging material is dependent on the characteristics of the food products to be packaged.

Ceramic Materials for Electronics

Ceramic Materials for Electronics Book
Author : Relva C. Buchanan
Publisher : CRC Press
Release : 2018-10-08
ISBN : 1482293048
Language : En, Es, Fr & De

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Book Description :

The Third Edition of Ceramic Materials for Electronics studies a wide range of ceramic materials, including insulators, conductors, piezoelectrics, and ferroelectrics, through detailed discussion of their properties, characterization, fabrication, and applications in electronics. The author summarizes the latest trends and advancements in the field, and explores important topics such as ceramic thin film, functional device technology, and thick film technology. Edited by a leading expert on the subject, this new edition includes more than 150 pages of new information; restructured reference materials, figures, and tables; as well as additional device application-oriented segments.

RF MEMS and Their Applications

RF MEMS and Their Applications Book
Author : Vijay K. Varadan,K. J. Vinoy,K. A. Jose
Publisher : John Wiley & Sons
Release : 2003-07-25
ISBN : 0470846194
Language : En, Es, Fr & De

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Book Description :

Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.

Micro and Smart Devices and Systems

Micro and Smart Devices and Systems Book
Author : K. J. Vinoy,G. K. Ananthasuresh,Rudra Pratap,S. B. Krupanidhi
Publisher : Springer
Release : 2014-05-21
ISBN : 8132219139
Language : En, Es, Fr & De

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Book Description :

The book presents cutting-edge research in the emerging fields of micro, nano and smart devices and systems from experts working in these fields over the last decade. Most of the contributors have built devices or systems or developed processes or algorithms in these areas. The book is a unique collection of chapters from different areas with a common theme and is immensely useful to academic researchers and practitioners in the industry who work in this field.

Smart Material Systems and MEMS

Smart Material Systems and MEMS Book
Author : Vijay K. Varadan,K. J. Vinoy,S. Gopalakrishnan
Publisher : John Wiley & Sons
Release : 2006-11-02
ISBN : 0470093625
Language : En, Es, Fr & De

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Book Description :

Presenting unified coverage of the design and modeling of smart micro- and macrosystems, this book addresses fabrication issues and outlines the challenges faced by engineers working with smart sensors in a variety of applications. Part I deals with the fundamental concepts of a typical smart system and its constituent components. Preliminary fabrication and characterization concepts are introduced before design principles are discussed in detail. Part III presents a comprehensive account of the modeling of smart systems, smart sensors and actuators. Part IV builds upon the fundamental concepts to analyze fabrication techniques for silicon-based MEMS in more detail. Practicing engineers will benefit from the detailed assessment of applications in communications technology, aerospace, biomedical and mechanical engineering. The book provides an essential reference or textbook for graduates following a course in smart sensors, actuators and systems.

From MEMS to Bio MEMS and Bio NEMS

From MEMS to Bio MEMS and Bio NEMS Book
Author : Marc J. Madou
Publisher : CRC Press
Release : 2011-06-13
ISBN : 1439895244
Language : En, Es, Fr & De

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Book Description :

From MEMS to Bio-MEMS and Bio-NEMS: Manufacturing Techniques and Applications details manufacturing techniques applicable to bionanotechnology. After reviewing MEMS techniques, materials, and modeling, the author covers nanofabrication, genetically engineered proteins, artificial cells, nanochemistry, and self-assembly. He also discusses scaling la

Advances in Electronic Ceramic Materials

Advances in Electronic Ceramic Materials Book
Author : Sheng Yao,Bruce A. Tuttle,Clive Randall,Dwight Viehland
Publisher : John Wiley & Sons
Release : 2009-09-28
ISBN : 0470291648
Language : En, Es, Fr & De

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Book Description :

The focus of this collection is on recent research and development related to a variety of sensor technologies as well as the latest advances concerning the synthesis and characterization of dielectric, piezoelectric, and ferroelectric materials.

Ceramic Integration and Joining Technologies

Ceramic Integration and Joining Technologies Book
Author : Mrityunjay Singh,Tatsuki Ohji,Rajiv Asthana,Sanjay Mathur
Publisher : John Wiley & Sons
Release : 2011-09-26
ISBN : 1118056760
Language : En, Es, Fr & De

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Book Description :

This book joins and integrates ceramics and ceramic-based materials in various sectors of technology. A major imperative is to extract scientific information on joining and integration response of real, as well as model, material systems currently in a developmental stage. This book envisions integration in its broadest sense as a fundamental enabling technology at multiple length scales that span the macro, millimeter, micrometer and nanometer ranges. Consequently, the book addresses integration issues in such diverse areas as space power and propulsion, thermoelectric power generation, solar energy, micro-electro-mechanical systems (MEMS), solid oxide fuel cells (SOFC), multi-chip modules, prosthetic devices, and implanted biosensors and stimulators. The engineering challenge of designing and manufacturing complex structural, functional, and smart components and devices for the above applications from smaller, geometrically simpler units requires innovative development of new integration technology and skillful adaptation of existing technology.

Handbook of Advanced Ceramics

Handbook of Advanced Ceramics Book
Author : Jun Akedo
Publisher : Elsevier Inc. Chapters
Release : 2013-04-11
ISBN : 0128057467
Language : En, Es, Fr & De

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Book Description :

Download Handbook of Advanced Ceramics book written by Jun Akedo, available in PDF, EPUB, and Kindle, or read full book online anywhere and anytime. Compatible with any devices.